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Fabrication techniques for superconducting readout loopsProcedures for the fabrication of superconducting readout loops out of niobium on glass substrates were developed. A computer program for an existing fabrication system was developed. Both positive and negative resist procedures for the production of the readout loops were investigated. Methods used to produce satisfactory loops are described and the various parameters affecting the performance of the loops are analyzed.
Document ID
19830009119
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Payne, J. E.
(South Carolina State Coll. Orangeburg, SC, United States)
Date Acquired
August 11, 2013
Publication Date
August 1, 1982
Publication Information
Publication: NASA. Marshall Space Flight Center The 1982 NASA(ASEE Summer Fac. Fellowship Program
Subject Category
Solid-State Physics
Accession Number
83N17390
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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