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Synchronized voltage contrast display analysis systemAn apparatus and method for comparing internal voltage potentials of first and second operating electronic components such as large scale integrated circuits (LSI's) in which voltage differentials are visually identified via an appropriate display means are described. More particularly, in a first embodiment of the invention a first and second scanning electron microscope (SEM) are configured to scan a first and second operating electronic component respectively. The scan pattern of the second SEM is synchronized to that of the first SEM so that both simultaneously scan corresponding portions of the two operating electronic components. Video signals from each SEM corresponding to secondary electron signals generated as a result of a primary electron beam intersecting each operating electronic component in accordance with a predetermined scan pattern are provided to a video mixer and color encoder.
Document ID
19830010725
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Johnston, M. F.
(JPL California Inst. of Tech., Pasadena, United States)
Shumka, A.
(JPL California Inst. of Tech., Pasadena, United States)
Miller, E.
(JPL California Inst. of Tech., Pasadena, United States)
Evans, K. C.
(JPL California Inst. of Tech., Pasadena, United States)
Date Acquired
September 4, 2013
Publication Date
November 9, 1982
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
Patent Application Number: US-PATENT-APPL-SN-038550
Patent Application Number: US-PATENT-APPL-SN-180230
Patent Number: NASA-CASE-NPO-14567-1
Patent Number: US-PATENT-4,358,732
Accession Number
83N18996
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-NPO-14567-1|US-PATENT-4,358,732
Patent Application
US-PATENT-APPL-SN-038550|US-PATENT-APPL-SN-180230
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