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Chemical etching for automatic processing of integrated circuitsChemical etching for automatic processing of integrated circuits is discussed. The wafer carrier and loading from a receiving air track into automatic furnaces and unloading onto a sending air track are included.
Document ID
19830014243
Acquisition Source
Legacy CDMS
Document Type
Technical Memorandum (TM)
Authors
Kennedy, B. W. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
September 4, 2013
Publication Date
April 1, 1981
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
NASA-TM-82411
NAS 1.15:82411
Report Number: NASA-TM-82411
Report Number: NAS 1.15:82411
Accession Number
83N22514
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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