Three-dimensional stylus profilometry

The method of three-dimensional stylus profilometry is presented together with a computer-based system for transforming the surface topography of a specimen into an intensity image. Examples are given in which intensity images obtained by stylus profilometry are compared with scanning electron micrographs and two other representations of the stylus data. The comparisons are made for three types of surface irregularities: a discrete feature, a periodic profile surface, and a random profile surface. It is shown that stylus profilometry provides high vertical resolution for low sloped surfaces and thus can be useful in revealing features not easily detectable with other methods.