Performance characteristics of a microwave plasma disk ion source

The development, design, and preliminary performance characteristics of a microwave plasma disk ion source are presented. Several important design concepts indigenous to microwave plasmas have been utilized in the development of this ion source: generation of a resonantly sustained microwave discharge inside a microwave/plasma coupler, probe and length tuning of the microwave/plasma coupler, and minimization of plasma volume. The experimental results for a 2.45 GHz, eight cm ion source excited in the TE(211) and TM(011) modes are described. Results are presented for electromagnetic mode excitation, electron density, coupling efficiency and loaded cavity Q, and I-V characteristics and efficiencies. It is preliminarily shown that a microwave disk-like plasma can be sustained adjacent to the grids with either TE or TM cavity modes at pressures below 2 x 10 to the -4th torr. Over 80% of the power absorbed in the cavity is coupled into the plasma.