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Preparing InSb SubstratesMolecular-beam epitaxial substrates passivated by chloride film growth. Chloride layer produced by direct chlorination, by chloride radicals in solutions, or by formation of preliminary oxide layer followed by chloride substitution.
Document ID
19840000317
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Vasquez, R. P. (CALTECH)
Lewis, B. F. (CALTECH)
Grunthaner, F. J. (CALTECH)
Date Acquired
August 12, 2013
Publication Date
April 1, 1985
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 4
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-16127
ISSN: 0145-319X
Report Number: NPO-16127
Accession Number
84B10317
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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