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Cleaning The Walls of A Silane ReactorScraper removes silicon deposits from inner walls of reactor vessel. Scraper supported by gas bearing. Scraper made of non-contaminating material such as quartz or silicon.
Document ID
19840000318
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Yamakawa, K. A. (CALTECH)
Date Acquired
August 12, 2013
Publication Date
April 1, 1985
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 4
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-15851
Report Number: NPO-15851
ISSN: 0145-319X
Accession Number
84B10318
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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