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Development of metallization processPastes are evaluated that contain additives to aid in the silicon to metallization contact. None are completely successful. Pastes are evaluated using a heated stage scanning electron microscope (SEM). This equipment shows promise for future evaluations.
Document ID
19840025960
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Garcia, A., III (Spectrolab, Inc. Sylmar, CA, United States)
Date Acquired
September 4, 2013
Publication Date
July 1, 1984
Subject Category
Energy Production And Conversion
Report/Patent Number
DRL-175
JPL-9950-941
REPT-6329-24
DOE/JPL-956205-84/7
NASA-CR-173943
NAS 1.26:173943
Report Number: DRL-175
Report Number: JPL-9950-941
Report Number: REPT-6329-24
Report Number: DOE/JPL-956205-84/7
Report Number: NASA-CR-173943
Report Number: NAS 1.26:173943
Accession Number
84N34031
Funding Number(s)
CONTRACT_GRANT: JPL-956205
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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