Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Kendall, B. R. F. (Pennsylvania State University University Park, PA, United States) Date Acquired
August 12, 2013
Publication Date
December 1, 1983
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 1
ISSN: 0734-2101
Subject Category
Instrumentation And Photography Accession Number
84A13125
Distribution Limits
Public