Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Lewis, B. F. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Grunthaner, F. J. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Fernandez, R. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Maserjian, J. (California Institute of Technology, Jet Propulsion Laboratory, Pasadena CA, United States) Lee, T. C. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Madhukar, A. (Southern California, University Los Angeles, CA, United States) Date Acquired
August 12, 2013
Publication Date
September 1, 1984
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 2
ISSN: 0734-211X
Accession Number
84A46100
Funding Number(s)
CONTRACT_GRANT: F49620-83-C-0074
CONTRACT_GRANT: N00014-83-K-0050
CONTRACT_GRANT: JPL-98531
Distribution Limits
Public