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Facility safety studyThe safety of NASA's in house microelectronics facility is addressed. Industrial health standards, facility emission control requirements, operation and safety checklists, and the disposal of epitaxial vent gas are considered.
Document ID
19850007450
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
September 5, 2013
Publication Date
October 1, 1979
Subject Category
Research And Support Facilities (Air)
Report/Patent Number
NASA-CR-174280
NAS 1.26:174280
Report Number: NASA-CR-174280
Report Number: NAS 1.26:174280
Accession Number
85N15759
Funding Number(s)
CONTRACT_GRANT: NAS8-32812
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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