Layered synthetic microstructure technology considerations for the extreme ultraviolet

It is demonstrated that layered synthetic microstructures (LSMs) can provide mirrors with enhanced normal incidence reflectance in the 300-A spectral region. Experimental results are presented for Pt-Si and Ir-Si structures fabricated by electron-beam deposition at pressures of about 10 to the -6th Torr, and it is shown that the enhancement is realized over a limited bandwidth of 75 A. One potential application of LSMs is their use as coatings on diffraction gratings to enhance normal incidence reflection efficiencies. Preliminary results for the Ir-Si combination on a diffraction grating show that LSMs enhance grating efficiencies in the EUV by a factor of about 3.