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Reactive-ion etching of 0.2 micron period gratings in tungsten and molybdenum using CBrF3
Document ID
19850041037
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
doi:10.1116/1.583244
Authors
Schattenburg, M. L. (Massachusetts Inst. of Tech. Cambridge, MA, United States)
Plotnik, I. (Massachusetts Inst. of Tech. Cambridge, MA, United States)
Smith, H. I. (MIT Cambridge, MA, United States)
Date Acquired
August 12, 2013
Publication Date
February 1, 1985
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 3
ISSN: 0734-211X
Subject Category
Metallic Materials
Report/Patent Number
ISSN: 0734-211X
Accession Number
85A23188
Funding Number(s)
CONTRACT_GRANT: NGL-22-009-638
Distribution Limits
Public
Copyright
Other

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