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Exploiting the Vacuum of SpaceMolecular-beam epitaxy and other processes tested with minimal contamination. Vacuum experimental facility for outer space creates vacuums higher than those available in terrestrial vacuum chambers. Facility minimizes contamination of work from walls and allows rapid removal of gases and heat generated by experimental processes. Used for processes such as molecular-beam epitaxy (growing semiconductor superlattices), metal/organic chemical vapor deposition, coating mirrors and other optical components, and ultrapurification.
Document ID
19860000397
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Naumann, R. J.
Date Acquired
August 12, 2013
Publication Date
July 1, 1986
Publication Information
Publication: NASA Tech Briefs
Volume: 10
Issue: 4
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
Report Number: MFS-28139
ISSN: 0145-319X
MFS-28139
Accession Number
86B10397
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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