Silicon production in an aerosol reactor

An aerosol reactor system was developed in which large particles of silicon can be grown by silane pyrolysis. To grow particles to sizes larger than one micron, vapor deposition must be used to grow a relatively small number of seed particles. Suppression of nucleation is achieved by limiting the rate of gas phase chemical reactions such that the condensible products of the gas phase chemical reactions diffuse to the surface of the seed particles as rapidly as they are produced. This prevents high degrees of supersaturation and runaway nucleation during the growth process. Particles on the order of 10 microns were grown repeatedly with the present aersol reactor. The nucleation controlled aerosol reactor is, therefore, a suitable system for the production of powders that can readily be separated from the gas by aerodynamic means.