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Recycling SilaneCostly gas purified after use in deposition reactor. Proposed method for recycling silane reduces cost of producing pure silicon for semiconductor devices.
Document ID
19870000334
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Lutwack, Ralph (Caltech)
Date Acquired
August 13, 2013
Publication Date
July 1, 1987
Publication Information
Publication: NASA Tech Briefs
Volume: 11
Issue: 7
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-16625
ISSN: 0145-319X
Report Number: NPO-16625
Accession Number
87B10334
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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