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Microscopic Gas-Flow ControllerProposed flow-controlling and -measuring device made by batch solid-state microelectronic-fabrication techniques. Device contains ultrasensitive silicon capacitive pressure transducer, gas-flow channels etched in silicon wafer, and integrated microvalves. Used to control and monitor low gas flows at low pressures.
Document ID
19870000415
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Wise, Kensall D. (University of Michigan)
Date Acquired
August 13, 2013
Publication Date
September 1, 1987
Publication Information
Publication: NASA Tech Briefs
Volume: 11
Issue: 8
ISSN: 0145-319X
Subject Category
Mechanics
Report/Patent Number
ARC-11704
Report Number: ARC-11704
ISSN: 0145-319X
Accession Number
87B10415
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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