NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Press Enter or click the Search button to begin your search.

Back to Results
Polycrystalline silicon research and developmentThe development of fluidized-bed reactor technology for producing silicon by the pyrolysis of silanes is described.
Document ID
19870007011
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Iya, S.
(Union Carbide Corp. New York, NY, United States)
Date Acquired
September 5, 2013
Publication Date
January 1, 1986
Publication Information
Publication: JPL, California Inst. of Tech., Pasadena Proceedings of the 26th Project Integration Meeting
Subject Category
Energy Production And Conversion
Accession Number
87N16444
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
No Preview Available