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Diamond film by hot filament CVD methodDiamond synthesis by the hot filament CVD method is discussed. A hot filament decomposes gas mixtures and oxygen containing organic compounds such as alcohols. which are carbon sources. The resulting thin films, growth mechanisms, and characteristics and problems associated with the hot filament CVD method are analyzed and evaluated.
Document ID
19880020234
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hirose, Y. (NASA Headquarters Washington, DC United States)
Date Acquired
September 5, 2013
Publication Date
September 1, 1988
Subject Category
Solid-State Physics
Report/Patent Number
NAS 1.77:20335
NASA-TT-20335
Report Number: NAS 1.77:20335
Report Number: NASA-TT-20335
Accession Number
88N29618
Funding Number(s)
CONTRACT_GRANT: NASW-4307
Distribution Limits
Public
Copyright
Public Use Permitted.
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