Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Lamb, J. L. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Thakoor, A. P. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Moopenn, A. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Khanna, S. K. (California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States) Date Acquired
August 13, 2013
Publication Date
August 1, 1987
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 5
ISSN: 0734-2101
Subject Category
Electronics And Electrical Engineering Accession Number
88A26195
Distribution Limits
Public