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Resistive synaptic interconnects for electronic neural networksThe use of the alpha-Ge(1-x):Al(x) and alpha-Ge(1-x):Cu(x) alloys and Pt/Al2O3 cermet thin films as resistive interconnects for binary synaptic memory arrays is evaluated. The fabrication of the 10-20 microns long, 10 microns wide, and 0.1 micron thick interconnects from the alloys and cermet is described. The current-voltage and switching characteristics of the as-deposited films and the patterned test structure are studied. The resistivity, uniformity, stability, and compatibility of the interconnects are examined. It is observed that alpha-Ge(1-x):Cu(x) alloys have a wide resistivity range and low temperature coefficients of resistance; however, their long-term stability is limited due to their low crystallization temperature. It is detected that the alpha-Ge(1-x):Al(x) alloys have higher crystallization temperatures and their resistivity is not greatly affected by large changes in metal content. The Pt/Al2O3 samples display excellent stability, easy fabrication, and control of resistivity with metal content.
Document ID
19880038968
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Lamb, J. L.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Thakoor, A. P.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Moopenn, A.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Khanna, S. K.
(California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States)
Date Acquired
August 13, 2013
Publication Date
August 1, 1987
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 5
ISSN: 0734-2101
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
ISSN: 0734-2101
Accession Number
88A26195
Distribution Limits
Public
Copyright
Other

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