Electro optical performance of an improved deformable mirror device

The design, fabrication, and performance of an improved 128 x 128 deformable mirror device (DMD) are discussed. The present DMD consists of a monolithically formed array of cantilever beams which are electrostatically deflected by an underlying MOS transistor address matrix. In contrast to an earlier version, the improved DMD on-chip address circuitry supports a single video input to the chip, with all demux operations performed on-chip. The cantilever beams are formed by two layers of high-reflectivity aluminum alloy. The dynamic range of the DMD in the Fourier plane at the Nyquist frequency has been determined at greater than 45 dB.