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Temporal evolution of collisionless sheathsExperimental measurements have been performed to determine the temporal evolution of Langmuir sheaths near an electrode to which a negative step bias is applied in a collisionless argon plasma. The plasma was produced by a hot-filament discharge in a multidipole device. Plasma potential data were obtained using emissive probes with two different techniques: time-resolved sampling and time-averaged techniques. The sheath is found to initially form close to the electrode, to extend to a maximum separation, and to contract to a steady-state value. The time scale required to reach a steady state is close to the time scale of the presheath relaxation. Characteristics of sheaths in RF plasmas are also measured using a parallel-plate plasma capacitor. It is observed that the plasma potential profile has significant variation with frequency, even for frequencies as low as 1 kHz which are far below the ion plasma frequency (about 1 MHz).
Document ID
19880067878
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Cho, M. H.
(Wisconsin Univ. Madison, WI, United States)
Hershkowitz, N.
(Wisconsin Univ. Madison, WI, United States)
Intrator, T.
(Wisconsin, University Madison, United States)
Date Acquired
August 13, 2013
Publication Date
October 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 6
ISSN: 0734-2101
Subject Category
Plasma Physics
Report/Patent Number
ISSN: 0734-2101
Accession Number
88A55105
Funding Number(s)
CONTRACT_GRANT: NAGW-905
CONTRACT_GRANT: NSF ECS-87-04529
CONTRACT_GRANT: NSF ECS-83-14488
Distribution Limits
Public
Copyright
Other

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