Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Cho, M. H. (Wisconsin Univ. Madison, WI, United States) Hershkowitz, N. (Wisconsin Univ. Madison, WI, United States) Intrator, T. (Wisconsin, University Madison, United States) Date Acquired
August 13, 2013
Publication Date
October 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 6
ISSN: 0734-2101
Accession Number
88A55105
Funding Number(s)
CONTRACT_GRANT: NAGW-905
CONTRACT_GRANT: NSF ECS-87-04529
CONTRACT_GRANT: NSF ECS-83-14488
Distribution Limits
Public