Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Banks, Bruce A. (Cleveland State Univ. OH., United States) Rutledge, Sharon K. (NASA Lewis Research Center Cleveland, OH, United States) Paulsen, Phillip E. (NASA Lewis Research Center Cleveland, OH, United States) Steuber, Thomas J. (Sverdrup Technology, Inc., Cleveland OH., United States) Date Acquired
September 5, 2013
Publication Date
January 1, 1989
Report/Patent Number
NASA-TM-101971E-4671NAS 1.15:101971 Meeting Information
Meeting: Annual Symposium on Applied Vacuum Science and Technology
Location: Clearwater Beach, FL
Country: United States
Start Date: February 6, 1989
End Date: February 8, 1989
Sponsors: American Vacuum Society
Accession Number
89N21104
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.