Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Naumann, Robert J. (NASA Marshall Space Flight Center Huntsville, AL, United States) Date Acquired
August 14, 2013
Publication Date
February 1, 1989
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 7
ISSN: 0734-2101
Accession Number
89A28950
Distribution Limits
Public