Document Type
Reprint (Version printed in journal)
Authors
Eldridge, J. I. (NASA Lewis Research Center Cleveland; Sverdrup Technology, Inc., Middleburg Heights, OH, United States) Honecy, F. S. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 14, 2013
Publication Date
June 1, 1990
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 8
ISSN: 0734-2101
Accession Number
90A36802
Distribution Limits
Public