Large scale fabrication of lightweight Si/SiC lidar mirrors

An up-scalable CVD process has been used to fabricate 7.5-cm models of lightweight Si/SiC mirrors consisting of an f/1.6 concave face-plate of SiC coated with CVD Si, in conjunction with a lightweight backup structure of SiC. Due to CVD chamber fabrication, no bonding agent was required to attach the SiC backup structure to the face-plate. Upon up-scaling, the SiC deposition process has been able to produce 40-cm diameter f/1.6 concave mirror face-plates. The mirrors were polished to a 1/5-wave figure and 10 A rms surface finish. There appear to be no intrinsic physical limits to further up-scaling of this mirror-fabrication process.