Versatile, low-cost, computer-controlled, sample positioning system for vacuum applications

A versatile, low-cost, easy to implement, microprocessor-based motorized positioning system (MPS) suitable for accurate sample manipulation in a Second Ion Mass Spectrometry (SIMS) system, and for other ultra-high vacuum (UHV) applications was designed and built at NASA LeRC. The system can be operated manually or under computer control. In the latter case, local, as well as remote operation is possible via the IEEE-488 bus. The position of the sample can be controlled in three linear orthogonal and one angular coordinates.