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Sputtering of Ions From Cu and Al by Low Energy Oxygen Ion BombardmentThe sputtering of Cu(+) and Al(+) ions from copper and aluminum while the target surface is bombarded with low energy oxygen ions (20 to 500 eV), is investigated. Both the ion yield, as a function of oxygen ion energy, and the kinetic energy distribution of the sputtered ions at a given oxygen ion energy are determined.
Document ID
19920013128
Acquisition Source
Johnson Space Center
Document Type
Abstract
Authors
T G Eck
(Case Western Reserve University Cleveland, United States)
L-Y Chen
(Case Western Reserve University Cleveland, United States)
R W Hoffman
(Case Western Reserve University Cleveland, United States)
Date Acquired
September 6, 2013
Publication Date
February 1, 1992
Publication Information
Publication: 5th Annual Workshop on Space Operations Applications and Research (SOAR 1991)
Publisher: National Aeronautics and Space Administration
Volume: 2
Subject Category
Metallic Materials
Report/Patent Number
NASA/CP-3127/Vol II
Meeting Information
Meeting: Space Operation, Application and Research Symposium
Location: Houston, TX
Country: US
Start Date: July 9, 1991
End Date: July 11, 1991
Sponsors: National Aeronautics and Space Administration, U.S. Air Force Phillips Laboratory, University of Houston - Clear Lake
Accession Number
92N22371
Distribution Limits
Public
Copyright
Portions of document may include copyright protected material.

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