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Pressure transducer and system for cryogenic environmentsA silicon pressure die is bonded to a borosilicate substrate above the pneumatic port. A Wheatstone bridge circuit is formed on the silicon pressure die and has bridge elements of silicon doped with boron to a deposit density level of approximately 1 x 10(exp 19)-10(exp 21) boron/cc. A current source is provided to excite the Wheatstone bridge circuit. In addition, a temperature sensor is provided to provide temperature readings. An array may be formed of the resulting pressure transducers. This unique solution of materials permits operation of a pressure transducer in cryogenic environments.
Document ID
19920019854
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Chapman, John J.
(NASA Langley Research Center Hampton, VA, United States)
Date Acquired
August 15, 2013
Publication Date
May 26, 1992
Subject Category
Instrumentation And Photography
Report/Patent Number
Patent Application Number: US-PATENT-APPL-SN-690198
Patent Number: US-PATENT-5,116,331
Patent Number: NASA-CASE-LAR-14579-1
Accession Number
92N29097
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-5,116,331|NASA-CASE-LAR-14579-1
Patent Application
US-PATENT-APPL-SN-690198
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