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Soft Sleeve Between Glove Box And InstrumentSleeve protects instrument from low frequency vibrations and helps maintain clean atmosphere for semiconductor analysis. Flexible sleeve joins glove box to specimen-introduction port of instrument chamber. Coupling made of brown nylon with inner layer of white rubber, attached to both areas with specially designed clamps. Thickness of sleeve material 0.01 in.
Document ID
19930000338
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Lombardi, Frank
(Caltech)
Date Acquired
August 16, 2013
Publication Date
June 1, 1993
Publication Information
Publication: NASA Tech Briefs
Volume: 17
Issue: 6
ISSN: 0145-319X
Subject Category
Mechanics
Report/Patent Number
NPO-17782
Report Number: NPO-17782
ISSN: 0145-319X
Accession Number
93B10338
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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