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Design considerations for ultra-precision magnetic bearing supported slidesDevelopment plans for a prototype servocontrolled machine with 1 angstrom resolution of linear motion and 50 mm range of travel are described. Two such devices could then be combined to produce a two dimensional machine for probing large planar objects with atomic resolution, the Angstrom Resolution Measuring Machine (ARMM).
Document ID
19930018373
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Slocum, Alexander H. (Massachusetts Inst. of Tech. Cambridge, MA, United States)
Eisenhaure, David B. (SatCon Technology Corp. Cambridge, MA., United States)
Date Acquired
September 6, 2013
Publication Date
January 1, 1993
Publication Information
Publication: NASA. Langley Research Center, Magnetic Suspension Technology Workshop
Subject Category
Mechanical Engineering
Accession Number
93N27562
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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