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Making Rectangular Apertures In SiliconConventional silicon micromachining techniques produce micrometer-sized rectangular apertures. Used to define source and detector openings for measurements of images and scattered light in visible, ultraviolet, and soft x-ray wavelength regions, and as general-purpose optical slits or slit arrays. Rectangular microscopic apertures replace circular pinholes made by puncturing foils with needles or by drilling foils with intense, highly-focused laser beams. Precise photolithography yields apertures of superior geometry.
Document ID
19940000119
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Leviton, Douglas B. (NASA Goddard Space Flight Center, Greenbelt, MD.)
Jhabvala, Murzy D. (NASA Goddard Space Flight Center, Greenbelt, MD.)
Mott, Brent (NASA Goddard Space Flight Center, Greenbelt, MD.)
Manthripragada, Sridhar (NASA Goddard Space Flight Center, Greenbelt, MD.)
Date Acquired
August 16, 2013
Publication Date
February 1, 1994
Publication Information
Publication: Laser Tech. Brief.
Volume: 2
Issue: 1
Subject Category
Fabrication Technology
Report/Patent Number
GSC-13529
Report Number: GSC-13529
Accession Number
94B10119
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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