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Etching Polymer Optical Waveguides With Atomic BeamsDirected beams of electrically neutral atoms used to etch smooth walls on polymer optical waveguides making waveguides more efficient.
Document ID
19940000603
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Minton, Timothy K. (Caltech)
Perry, Joseph W. (Caltech)
Date Acquired
August 16, 2013
Publication Date
October 1, 1994
Publication Information
Publication: Laser Tech. Brief.
Volume: 2
Issue: 4
Subject Category
Fabrication Technology
Report/Patent Number
Report Number: NPO-19121
NPO-19121
Accession Number
94B10603
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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