NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login

Press Enter or click the Search button to begin your search.

Back to Results
Improved Electromechanical Infrared SensorProposed electromechanical infrared detector improved version of device described in "Micromachined Electron-Tunneling Infrared Detectors" (NPO-18413). Fabrication easier, and undesired sensitivity to acceleration reduced. In devices, diaphragms and other components made of micromachined silicon, and displacements of diaphragms measured by electron tunneling displacement transducer {see "Micromachined Tunneling Accelerometer" (NPO-18513)}. Improved version offers enhanced frequency response and less spurious response to acceleration.
Document ID
19940000617
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Kenny, Thomas W. (Caltech)
Kaiser, William J. (Caltech)
Date Acquired
August 16, 2013
Publication Date
November 1, 1994
Publication Information
Publication: NASA Tech Briefs
Volume: 18
Issue: 11
ISSN: 0145-319X
Subject Category
Electronic Components And Circuits
Report/Patent Number
Report Number: NPO-18560
ISSN: 0145-319X
NPO-18560
Accession Number
94B10617
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Available Downloads

There are no available downloads for this record.

Related Records

There are no records associated with this record.
No Preview Available