Design of A CVD Reactor for the Deposition of Diamond in A Microgravity EnvironmentThere is a growing body of theoretical and experimental evidence suggesting that the uniformity, rate, adhesion, quality, and other key properties of Chemical Vapor Deposition (CVD) diamond coatings are influenced by the gas mixing kinetics in the thermal plasma environment of the reaction chamber. The implementation of, for example, Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) process in microgravity has, thus, been suggested. Such a diamond deposition system, which overcomes the limitations of present systems and which is distiguishable from them by the use of high pressure MPECVD and recirculation of the would be effluent hydrogen and carbon, is described. Given the key fact that there is nothing in the effluent of the MPECVD process that is truly a byproduct or 'waste', the system can, at least in principle, lend itself to being closed loop yet dynamic. The exhaust contains hydrogen and carbon species which can be recirculated to the plasma reactor, that is, since there are no unusable reaction byproducts, the effluent can be fed back to the reaction chamber with no detriment, thus allowing deployment in a microgravity environment.
Document ID
19940005672
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
M L Languell (Vanderbilt University Nashville, Tennessee, United States)
J L Davidson (Vanderbilt University Nashville, Tennessee, United States)
A M Strauss (Vanderbilt University Nashville, Tennessee, United States)
Date Acquired
September 6, 2013
Publication Date
August 1, 1992
Publication Information
Publication: Proceedings of the 8th European Symposium on Materials and Fluid Sciences in Microgravity, Volume 1
Publisher: European Space Agency
Volume: 1
ISBN: 92-9092-174-9
Subject Category
Materials Processing
Report/Patent Number
ESA-SP-333-VOL-1NAGW-2540179925NASA 557-29
Meeting Information
Meeting: 8th European Symposium on Materials and Fluid Sciences in Microgravity