Tracking capabilities of SPADs for laser ranging

The spatial sensitivity of Single-Photon Avalanche Diodes (SPADs) can be exploited in laser ranging measurements to finely tune the laser spot in the center of the detector sensitive area. We report the performance of a SPAD with l00 micron diameter. It features a time resolution better than 80 ps rms when operated 4V above V(b) at minus 30 C, and a spatial sensitivity better than 20 microns to radial displacements of the laser spot. New SPAD structures with auxiliary delay detectors are proposed. These improved devices could allow a two dimensional sensitivity, that could be employed for the design of pointing servos.