Differential phase acoustic microscope for micro-NDE

A differential phase scanning acoustic microscope (DP-SAM) was developed, fabricated, and tested in this project. This includes the acoustic lens and transducers, driving and receiving electronics, scanning stage, scanning software, and display software. This DP-SAM can produce mechanically raster-scanned acoustic microscopic images of differential phase, differential amplitude, or amplitude of the time gated returned echoes of the samples. The differential phase and differential amplitude images provide better image contrast over the conventional amplitude images. A specially designed miniature dual beam lens was used to form two foci to obtain the differential phase and amplitude information of the echoes. High image resolution (1 micron) was achieved by applying high frequency (around 1 GHz) acoustic signals to the samples and placing two foci close to each other (1 micron). Tone burst was used in this system to obtain a good estimation of the phase differences between echoes from the two adjacent foci. The system can also be used to extract the V(z) acoustic signature. Since two acoustic beams and four receiving modes are available, there are 12 possible combinations to produce an image or a V(z) scan. This provides a unique feature of this system that none of the existing acoustic microscopic systems can provide for the micro-nondestructive evaluation applications. The entire system, including the lens, electronics, and scanning control software, has made a competitive industrial product for nondestructive material inspection and evaluation and has attracted interest from existing acoustic microscope manufacturers.