Electromagnetically levitated vibration isolation system for the manufacturing process of silicon monocrystals

This paper introduces a study on an Electromagnetically Levitated Vibration Isolation System (ELVIS) for isolation control of large-scale vibration. This system features no mechanical contact between the isolation table and the installation floor, using a total of four electromagnetic actuators which generate magnetic levitation force in the vertical and horizontal directions. The configuration of the magnet for the vertical direction is designed to prevent any generation of restoring vibratory force in the horizontal direction. The isolation system is set so that vibration control effects due to small earthquakes can be regulated to below 5(gal) versus horizontal vibration levels of the installation floor of up t 25(gal), and those in the horizontal relative displacement of up to 30 (mm) between the floor and levitated isolation table. In particular, studies on the relative displacement between the installation floor and the levitated isolation table have been made for vibration control in the horizontal direction. In case of small-scale earthquakes (Taft wave scaled: max. 25 gal), the present system has been confirmed to achieve a vibration isolation to a level below 5 gal. The vibration transmission ratio of below 1/10 has been achieved versus continuous micro-vibration (approx. one gal) in the horizontal direction on the installation floor.