Simulated imaging properties of a series of magnetic electron lenses

The paraxial lens data were determined for a series of symmetrical magnetic lenses of equal lens diameter but variable air gap width for a wide range of lens excitations using the three-dimensional electrodynamic computer code MAFIA. The results are compared with a similar study done by Liebman and Grad wherein the field distributions within the lenses were measured experimentally with a resistance network analogue. Using these fields the lens data were obtained through numerical trajectory tracing. The utility of using MAFIA, instead of experimental methods for lens design is shown by the excellent agreement of the simulated results compared to experiment. Also demonstrated is the capability of using MAFIA to investigate aberration sources such as higher order off-axis magnetic field and space-charge effects.