Fabrication of silicon-based shape memory alloy micro-actuatorsThin film shape memory alloy has been integrated with silicon in a new actuation mechanism for microelectromechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy microactuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.
Document ID
19950048399
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Johnson, A. David (TiNi Alloy Co., San Leandro, CA US, United States)
Busch, John D. (TiNi Alloy Co., San Leandro, CA US, United States)
Ray, Curtis A. (Microflow Analytical, Inc. Livermore, CA, US, United States)
Sloan, Charles L. (Microflow Analytical, Inc. Livermore, CA, US, United States)
Date Acquired
August 16, 2013
Publication Date
January 1, 1992
Publication Information
Publisher: Materials Research Society (MRS Symposium Proceedings, Vol. 276)
IDRelationTitle19950048381Collected WorksSmart materials fabrication and materials for micro-electro-mechanical systems; Symposium Proceedings, San Francisco, CA, Apr. 28-30, 1992