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Small-Modulation EllipsometerSmall-modulation ellipsometer contains no moving parts and insensitive to small misalignments. Provides real-time, simultaneous measurements of both ellipsometric parameters, without need for separate calibration measurement or tedious adjustments. Can be made compact and rugged for operation in harsh environments.
Document ID
19950065252
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Woollam, J. (J. A. Woollam Co.)
Johs, B. (J. A. Woollam Co.)
Ducharme, S. (J. A. Woollam Co.)
Machlab, H. (J. A. Woollam Co.)
Date Acquired
August 17, 2013
Publication Date
February 1, 1995
Publication Information
Publication: Laser Tech. Brief.
Issue: 1
Subject Category
Physical Sciences
Report/Patent Number
MFS-26235
Report Number: MFS-26235
Accession Number
95B10093
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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