Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Ziad, H. (Interuniversity Micro-Electronics Center Leuven, Belgium) Slater, T. (Wildcat Micromachining San Francisco, CA United States) vanGerwen, P. (Interuniversity Micro-Electronics Center Leuven, Belgium) Masure, E. (Verhaert Design and Development Kruibeke, Belgium) Preudhomme, F. (Verhaert Design and Development Kruibeke, Belgium) Baert, K. (Interuniversity Micro-Electronics Center Leuven, Belgium) Date Acquired
September 6, 2013
Publication Date
January 1, 1995
Accession Number
96N36387
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.