Modeling Piezoelectric Stack Actuators for Control of Micromanipulation

A nonlinear lumped-parameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for microrobotic applications requiring accurate position and/or force control. In formulating this model, the authors propose a generalized Maxwell resistive capacitor as a lumped-parameter causal representation of rate-independent hysteresis. Model formulation is validated by comparing results of numerical simulations to experimental data. Validation is followed by a discussion of model implications for purposes of actuator control.