Raman Shifting a Tunable ArF Excimer Laser to Wavelengths of 190 to 240 nm With a Forced Convection Raman Cell

Tunable radiation, at ultraviolet wavelengths, is produced by Raman shifting a modified 285-mJ ArF excimer laser. Multiple Stokes outputs are observed in H2, CH4, D2, N2, SF6, and CF4 (20, 22, 53, 21, 2.1, and 0.35 percent, respectively). Numbers in parentheses are the first Stokes energy conversion efficiencies. We can access 70 percent of the frequency range 42000-52000 cm (exp -1) (190-240 nm) with Stokes energies that vary from 0.2 microJoule to 58 mJ inside the Raman cell. By using 110 mJ of pump energy and D 2 , the tunable first Stokes energy varies over the 29-58 mJ range as the wavelength is tuned over the 204-206 nm range. Dependence on input energy, gas pressure, He mixture fraction, and circulation of the gas in the forced convection Raman cell is discussed; Stokes conversion is also discussed for laser repetition rates from 1 to 100 Hz. An empirical equation is given to determine whether forced convection can improve outputs for a given repetition rate.