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Method of Forming Micro-Sensor Thin-Film AnemometerA device for measuring turbulence in high-speed flows is provided which includes a micro- sensor thin-film probe. The probe is formed from a single crystal of aluminum oxide having a 14 deg half-wedge shaped portion. The tip of the half-wedge is rounded and has a thin-film sensor attached along the stagnation line. The bottom surface of the half-wedge is tilted upward to relieve shock induced disturbances created by the curved tip of the half-wedge. The sensor is applied using a microphotolithography technique.
Document ID
20000048258
Acquisition Source
Langley Research Center
Document Type
Other - Patent
Authors
Sheplak, Mark (NASA Langley Research Center Hampton, VA United States)
McGinley, Catherine B. (NASA Langley Research Center Hampton, VA United States)
Spina, Eric F. (NASA Langley Research Center Hampton, VA United States)
Stephens, Ralph M. (NASA Langley Research Center Hampton, VA United States)
Hopson, Purnell, Jr. (NASA Langley Research Center Hampton, VA United States)
Cruz, Vincent B. (NASA Langley Research Center Hampton, VA United States)
Date Acquired
September 7, 2013
Publication Date
February 1, 2000
Subject Category
Instrumentation And Photography
Report/Patent Number
Patent Number: US-Patent-6,018,861
Patent Application Number: US-Patent-Appl-SN-361601
Patent Application Number: US-Patent-Appl-SN-698559
Patent Number: NASA-Case-LAR-15112-2-CU
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-6,018,861|NASA-Case-LAR-15112-2-CU
Patent Application
US-Patent-Appl-SN-361601|US-Patent-Appl-SN-698559

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