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Multi-Channel Electronically Scanned Cryogenic Pressure Sensor And Method For Making SameA miniature, multi-channel, electronically scanned pressure measuring device uses electrostatically bonded silicon dies in a multi-element array. These dies are bonded at specific sites on a glass, pre-patterned substrate. Thermal data is multiplexed and recorded on each individual pressure measuring diaphragm. The device functions in a cryogenic environment without the need of heaters to keep the sensor at constant temperatures.
Document ID
20010096161
Acquisition Source
Langley Research Center
Document Type
Other - Patent
Authors
Chapman, John J. (NASA Langley Research Center Hampton, VA United States)
Hopson, Purnell, Jr. (NASA Langley Research Center Hampton, VA United States)
Holloway, Nancy M. (NASA Langley Research Center Hampton, VA United States)
Date Acquired
September 7, 2013
Publication Date
June 19, 2001
Subject Category
Instrumentation And Photography
Report/Patent Number
Patent Number: US-Patent-6,247,369
Patent Number: NASA-Case-LAR-15939-1
Patent Application Number: US-Patent-Appl-SN-944026
Patent Application Number: US-Patent-Appl-SN-229931
Patent Application Number: US-Patent-Appl-SN-416596
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-6,247,369|NASA-Case-LAR-15939-1
Patent Application
US-Patent-Appl-SN-944026|US-Patent-Appl-SN-229931|US-Patent-Appl-SN-416596

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