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On the Fabrication and Behavior of Diamond Microelectromechanical Sensors (DMEMS)CVD (chemically vapor deposited) diamond films can be processed similar to "conventional" semiconductor device fabrication and as such can be used to achieve microelectromechanical structures (MEMS) also similar to, for example, silicon technology. Very small cantilever beams, membranes, stripes, tips, etc. can be constructed in doped and undoped diamond films and offer an array of choices in diamond with its known superior properties such as elastic modulus, high temperature semiconduction, high thermal conductivity, very low coefficient of expansion and numerous other diamond parameters. This paper will review the construction and behavior of the second generation DMEMS devices comprised as an accelerometer with a diamond diaphragm for use in very high G applications and a diamond pressure sensor for very high temperature and frequency response.
Document ID
Acquisition Source
Document Type
Conference Paper
Holmes, K.
(Vanderbilt Univ. Nashville, TN United States)
Davidson, J. L.
(Vanderbilt Univ. Nashville, TN United States)
Kang, W. P.
(Vanderbilt Univ. Nashville, TN United States)
Howell, M.
(Vanderbilt Univ. Nashville, TN United States)
Date Acquired
August 20, 2013
Publication Date
July 1, 2001
Publication Information
Publication: Proceedings of the Sixth Applied Diamond Conference/Second Frontier Carbon Technology Joint Conference (ADC/FCT 2001)
Subject Category
Mechanical Engineering
Distribution Limits
Work of the US Gov. Public Use Permitted.
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