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Laser Micromachining Fabrication of THz ComponentsLaser micromachining techniques can be used to fabricate high-quality waveguide structures and quasi-optical components to micrometer accuracies. Successful GHz designs can be directly scaled to THz frequencies. We expect this promising technology to allow the construction of the first fully integrated THz heterodyne imaging arrays. At the University of Arizona, construction of the first laser micromachining system designed for THz waveguide components fabrication has been completed. Once tested and characterized our system will be used to construct prototype THz lx4 focal plane mixer arrays, magic tees, AR coated silicon lenses, local oscillator source phase gratings, filters and more. Our system can micro-machine structures down to a few microns accuracy and up to 6 inches across in a short time. This paper discusses the design and performance of our micromachining system, and illustrates the type, range and performance of components this exciting new technology will make accessible to the THz community.
Document ID
Document Type
Conference Paper
DrouetdAubigny, C.
(Arizona Univ. United States)
Walker, C.
(Arizona Univ. United States)
Jones, B.
(Arizona Univ. United States)
Groppi, C.
(Arizona Univ. United States)
Papapolymerou, J.
(Arizona Univ. United States)
Tavenier, C.
(Arizona Univ. United States)
Date Acquired
August 20, 2013
Publication Date
December 1, 2001
Publication Information
Publication: Proceedings of the Twenlfth International Symposium on Space Terahertz Technology
Subject Category
Lasers And Masers
Funding Number(s)
Distribution Limits
Work of the US Gov. Public Use Permitted.

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IDRelationTitle20020038920Analytic PrimaryProceedings of the Twelfth International Symposium on Space Terahertz Technology
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