NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Ultra-Precision OpticsUnder a Joint Sponsored Research Agreement with Goddard Space Flight Center, SEMATECH, Inc., the Silicon Valley Group, Inc. and Tinsley Laboratories, known as SVG-Tinsley, developed an Ultra-Precision Optics Manufacturing System for space and microlithographic applications. Continuing improvements in optics manufacture will be able to meet unique NASA requirements and the production needs of the lithography industry for many years to come.
Document ID
20020063397
Acquisition Source
Goddard Space Flight Center
Document Type
Other
Date Acquired
September 7, 2013
Publication Date
January 1, 1999
Publication Information
Publication: Spinoff 1999
ISBN: 0-16-050159-8
Subject Category
Optics
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
No Preview Available