Cleanroom Contaminant Monitor

Under a Small Business Innovation Research (SBIR) contract from Kennedy Space Center (KSC), Femtometrics, Inc. developed the Real-Time Non-Volatile Residue (NVR) monitor. Criteria established by KSC called for a technology that could regulate the accumulation of nonvolatile residues in cleanroom environments. The company accommodated the Center's need with an advanced, highly sensitive surface acoustic wave (SAW) microsensor capable of detecting sub-monolayer deposition in cleanrooms where aerospace systems are assembled. Years earlier, Femtometrics responded to and received SBIR contracts from Langley Research Center for highly sensitive aerosol detectors for environmental researchers. Stimulated by the SBIR wins, the company set about to develop the SAW resonator technology. A new type of sensor has evolved from the research, one that has the ability to measure a range of chemical vapors by applying chemical-specific coating on the sensing surface. Commercial applications of the Real-Time NVR include Class 1 cleanrooms at semiconductor and hard-disk manufacturing plants.